장비검색/예약
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- 장비검색/예약
정보제공 : ZEUS 장비활용종합포털(www.zeus.go.kr)
유기금속기상화학증착기
Metal-organic chemical vapor deposition(MOCVD) SYSTEM
| GBTP No. | GBREMS-18-0118 |
|---|---|
| NFEC등록번호 | NFEC-2012-10-172663 |
| I-tube등록번호 | 1206-C-0012 |
| 보유기관 | 영남대학교 산학협력단 |
| 연락처 | 053-810-2344 |
| 대표번호 | - |
장비정보
| 모델명 | K465i GaN MOCVD System | 제작사 | Veeco |
|---|---|---|---|
| 취득일자 | 2012-09-24 | 취득금액 | 1,883,850,031원 |
| 표준분류 | 기계가공/시험장비 > 반도체장비 > 유기금속화학증착장비 | 활용용도 | 시험 |
| 장비위치 |
경상북도 경산시 대학로 280 (대동) 214-1번지 영남대학교 CRC F1층 클린룸 (102호)
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| 장비설명 |
MOCVD should have the high performance for making epitaxial layers growth for GaN
based device materials especially LED LD. For achieving GaN base epitaxial growth available toultra high uniformity growth of layered structures of 3-5 semiconductors an other materials at elevated growth temperatures. MOCVD has configurations for GaN growth chamber which run repeatability by Laminar flow pattern growth technique for precise process control and improved. MOCVD and installation procedure should be also included for hook-up of system Veeco provides Manual CD-ROM with shipment. |
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| 구성 및 기능 |
MOCVD should have fulfill our material properties of GaN epilayers
and our custom conditions for system definition and our growth recipe. MOCVD companies should have experiences of supplying system over 100 systems a year to major LED companies including Korea Japan China EU US and guarantee the performance of 6" wafer manufacturing. Providing Model should be shipped over 100 systems over the MOCVD market. MOCVD company should have experience of supplying mass production system to major Korea LED companies such as Samsung LED LG innotek Seoul Semiconductor. |
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